Rutgers University IAMDN Microelectronics Research Laboratory
Piscataway, , NJ , US
Academic Core Facility
The Microelectronics Research Laboratory (MERL) works closely with researchers in academia, government and industry to help solve problems in multidisciplinary science and engineering and high-tech industry, to carry out advanced research in micro- and nano-optoelectronics, solid state devices and electronic materials. The capabilities of the laboratory include a dry processing area for plasma processing, thin film metallization and dielectric, thermal processing, ultraviolet lithography, nano-imprint and most recently atomic layer deposition, including: Metrology/Inspection – ISI Scanning Electron Microscope – SEM (microelectronics) Description: Scanning Electron Microscope
|Rutgers University IAMDN Microelectronics Research Laboratory Engn - Elec & Computer Engn 94 Brett Road, Rm 115 Piscataway, , NJ , 08854-8058 United States|
|Rutgers University IAMDN Microelectronics Research Laboratory 465 Northwestern Avenue West Lafayette, IN, 47907 United States|
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