The Microelectronics Research Laboratory (MERL) works closely with researchers in academia, government and industry to help solve problems in multidisciplinary science and engineering and high-tech industry, to carry out advanced research in micro- and nano-optoelectronics, solid state devices and electronic materials. The capabilities of the laboratory include a dry processing area for plasma processing, thin film metallization and dielectric, thermal processing, ultraviolet lithography, nano-imprint and most recently atomic layer deposition, including: Metrology/Inspection – ISI Scanning Electron Microscope – SEM (microelectronics) Description: Scanning Electron Microscope